Semiconductors

Semiconductors are used heavily in everyday life, from consumer electronics to transportation and communication, and annual sales are in the hundreds of billions of dollars. In semiconductor manufacturing, per- and polyfluoroalkyl substances (PFAS) are present in a variety of essential processing chemicals. Photoacid generators, fluorinated polyimides, poly(benzoxazole)s, antireflection coatings, topcoats, embedded barrier layers, fluorinated surfactants, and materials for nanoimprint lithography all contain some form of PFAS. Due to increasing regulations, the semiconductor industry is looking for PFAS waste management solutions.

Enspired Solutions’ PFASigator® has proven experience destroying fluoropolymers present in a poplar top antireflective coating product (TARC) that is used in semiconductor manufacturing. Enspired Solutions® energy efficient, patented photoactivated reductive defluorination (PRD) process breaks the carbon-fluorine bonds of PFAS, destroying the molecules and resulting in no off-site PFAS waste disposal.  

With the semiconductor industry’s increasing need for effective PFAS waste management solutions, Enspired Solutions ® is at the forefront of innovation.

PFASigator® Advantages

  1. Enspired Solutions’® photoactivated reductive defluorination (PRD) technology successfully destroyed fluoropolymers in a popular top antireflective coating (TARC) product used in semiconductor manufacturing.
  2. Rapid fluoride ion release was observed in a solution of TARC diluted 10,000x, indicating efficient destruction of fluoropolymers in solution.
  3. Based on data collected, a treatment train scenario was developed for the 10,000x diluted TARC waste stream using Enspired Solutions’ PFASigator®. Destruction costs were estimated at ~$0.01/L of diluted TARC waste or ~$0.70/L of concentrated TARC waste.

Read a detailed case study of our TARC destruction success HERE

Ready to test the PFASigator® on your site sample or do a field-scale pilot?  Contact us today!